1X Master, Soda Lime, 5"x5"x0.09"
Minimum critical feature: 2.0um
Defect density: 1 per in^2 (0.2 per cm^2)
Write area: 1" smaller than mask size
Compugraphics product code: 2160A2
Flow layer (SPR220, positive resist)
Data parity chrome up = Wrong
Title parity chrome up = Wrong
Data window = Compugraphics default
Control layer (SU8, negative resist)
Data parity chrome up = Wrong
Title parity chrome up = Wrong
Data window = Compugraphics default
Double-check these settings very carefully!
Lower resistivity: 1 ohm.cm
Upper resistivity: 10 ohm.cm