High Resolution 3DEM via FIB-SEM
The FIB-SEM is also used to collect targeted 3D volumes using a heated Ga+ liquid metal ion source (LMIS) slicing 4nm-thick for hundreds of slices. The slicing/imaging cycle is automated using the Thermo Fisher Scientific AutoSlice and View™ or Zeiss Atlas software packages. There is no need to remove the sample from the microscope before 3D data acquisition, but if necessary a three-point alignment using the montage created in step 2 and the current stage position is recommended in order to easily find ROIs.
Samples are tilted such that the block face is perpendicular to the FIB (52o on a FEI/Thermo Scientific instrument, 54o on a Zeiss or Tescan) for thin slicing. Without moving the stage, a backscattered electron image is generated with the SEM after slicing is completed. The process repeats to form an image stack which is later aligned and annotated. Fiducial markers are placed near the ROI to aid in slice and image placement. A carbon or platinum protective capping layer is deposited over the volume to be collected in order to maintain the sample integrity during ion beam fiducial recognition.
Imaging and slicing conditions for FIB-SEM data generation in this workflow are found standard on most instruments. Imaging conditions will be the same as used in step 2. During 3D data collection on a FEI/Thermo Scientific Helios FIB-SEM, the in-column (ICD) and through-the-lens (TLD) detectors are used to form backscattered electron images. The TLD is used for fiducial recognition and automated alignment functions. The ICD provides the final image used in data reconstruction due to its superior ability to image fine, crisp membranes with higher contrast. Milling conditions are 30 keV, 0.79 nA with a 30-μm z-depth. Typical milling conditions on a Zeiss Crossbeam 550 are 30 keV, 0.7nA with a 30-μm z-depth. Images are collected using the EsB detector.
FIB-SEM provides roughly 25 x 20 x 8 µm3 volumes in 72 hours. Voxel sizes are isotropic at 4 nm resolution. These volumes are suitable for viewing cellular components like mitochondria, Golgi apparatus, and nucleoli in fine detail.
Once completed, image stacks are exported to a third-party software, such as Thermo Scientific Amira or ORS Dragonfly, for registration and segmentation.